| Avtor/Urednik | Ghorbani, Hamid; Stoyan, Dietrich | |
| Naslov | Estimation the intesity of germ-grain models with overlapping grains | |
| Tip | članek | |
| Vir | Image Anal Stereol | |
| Vol. in št. | Letnik 22, št. 3 | |
| Leto izdaje | 2003 | |
| Obseg | str. 147-52 | |
| Jezik | eng | |
| Abstrakt | Formulas are derived for the spherical contact distribution of a planar germ-grain model Z with circular grains where the germs form either a "segment cluster" process or a "line-based" Poisson point process. They are used in order to estimate the intensity lambda of the germ process by means of the spherical contact distribution function. As an application the number of dislocations on a silicon wafer is estimated. | |
| Deskriptorji | PARTICLE SIZE SILICON CLUSTER ANALYSIS PROBABILITY |