Avtor/Urednik		Milošev, Ingrid; Strehblow, Hans-Henning; Navinšek, Boris; Panjan, Peter
Naslov		Titanium nitride by XPS
Tip		članek
Vir		Surf Sci Spectra
Vol. in št.		Letnik 5, št. 2
Leto izdaje		1998
Obseg		str. 145-51
Jezik		eng
Abstrakt		Titanium nitride (TiN) coatings have been deposited on polished steel substrates by a plasma-beam sputtering technique in a Sputron apparatus (Balzers A. G.) at 200 degrees C. A thin intermediate layer of Ti (0.08 micro m) was deposited between the substrate and the 2.8 micro thick TiN coating. The average rougness, Ra, of the substrate was <.04 micro m, whereas after the deposition Ra values between 0.06 and 0.08 miro m vere measured for TiN coatings. Coatings exhibit a fine grain structure of the grain size <100 nm. The XPS measurements were performed in an Escalab 200-X spectrometer (VG Instruments) using non-monochromated A1 K alpha radiation from atwin Mg/A1 anode operating at 300 W. The hemispherical energy analyzer was operated in the CAE mode with a constant pass energy of 20 eV. In the present paper the following spectra are presented: survey spectrum, spectra of major elements titanium and nitrogen (Ti 2p and n 1 s), spectra of minor elements oxygen and carbon (O 1s and C 1s), and valence band spectrum. Spectra were background subtracted using a Shirley method. Peak positions and widths were determined from least squares fitting procedure.
Deskriptorji		ALLOYS TITANIUM NITROGEN SPECTRUM ANALYSIS