Author/Editor | Panjan, P; Navinšek, B; Žabkar, A; Fišer, J; Zalar, A | |
Title | Characterization of TiNx and ZrNx multilayered structures by Auger electron spectroscopy | |
Type | članek | |
Source | Vacuum | |
Vol. and No. | Letnik 40, št. 1-2 | |
Publication year | 1990 | |
Volume | str. 81-4 | |
Language | eng |