Author/Editor		Panjan, P; Navinšek, B; Cvelbar, A; Zalar, A; Milošev, I
Title		Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature
Type		članek
Source		Thin Solid Films
Vol. and No.		Letnik 281-2
Publication year		1996
Volume		str. 298-301
Language		eng
Abstract		All the coatings and multilayer structures were deposited in a Sputron plasma-beam-sputtering apparatus at a temperature below 150 degrees C on polished alumina substrates (Ra = 25 nm) and polished tool steel discs. The coatings were annealed in an oxygen flow at temperatures in the range 500-850 degrees C. The oxidation kinetics of these coatings were studied by means of the weight gain as a function of the oxidation time at each temperature. On the same coatings, continuous in situ electrical resistivity measurements were taken andthese indicate grain boundary oxidation. The composition and the depth profiles of the oxidation products formed were investigated using AES and XPS combined with sputter profiling. The oxie layers were found to grow according to a parabolic diffusion law with activation energies of 1.04, 1.89, 1.92, 2.37, 2.91 and 3.98 e V for Ti0.63Zr0.37N, TiN, CrN, ZrN, TiN/CrN and Cr0.72Ti0.28N, respectively.
Descriptors		TITANIUM CHROMIUM ALLOYS ZIRCONIUM CORROSION OXYGEN TEMPERATURE