Author/Editor		Milošev, I; Strehblow, H-H; Navinšek, B
Title		Oxidation of ternary TiZrN hard coatings studied by XPS
Type		članek
Source		Surf Interface Anal
Vol. and No.		Letnik 26, št. 7-8
Publication year		1998
Volume		str. 242-8
Language		eng
Abstract		Electrochemical and thermal oxidation of TiZrN hard coatings deposited by the plasma beam sputtering technique are investigated using x-ray photoelectron spectroscopy (XPS). Ternary TiZrN coatings are found to be more susceptible towards oxidation compared to binary TiN and ZrN coatings. Electrochemical oxidation results in the formation of a mixed Ti(N,O)+Zr(N,O) oxynitride layer in the lower potential range (up to 1.1. V), whereas at higher potentials a mixed TiO2+ZrO2 oxide layers is formed. This layers still incorporates a certain amount of nitrogen released during transformation of nitride to oxide. A similar is observed in the case of thermal oxidation at 350-600 degree C, where the main product is a mixed TiO2+ZrO2 layer. Nitrogen, which should normally be evolved during oxidation, remains incorporated in the growing oxide layer. No tendency towards alternate layer formation, i.e. ZrO2/TiO2, was observed under the experimental conditions investigated.
Descriptors		ELECTROPLATING TITANIUM ZIRCONIUM CORROSION SPECTROMETRY, X-RAY EMISSION HEAT