Author/Editor		Milošev, Ingrid; Strehblow, Hans-Henning; Navinšek, Boris; Panjan, Peter
Title		Zirconium nitride by XPS
Type		članek
Source		Surf Sci Spectra
Vol. and No.		Letnik 5, št. 2
Publication year		1998
Volume		str. 152-8
Language		eng
Abstract		Zirconium nitride (ZrN) coatings have been deposited on polished steel substrates by a plasmabeam sputtering technique in a Sputron apparatus (Balzers A. G.) at 200 degrees C. A thin intermediate layer of Zr (0.08 micro m) was deposited between the substrate and the 2.8 micro m thick ZrN coating. The average roughness, Ra, of the substrate was <0.04 micro m, whereas after the deposition Ra values between 0.06 and 0.08 micro m were measured for ZrN coatings. Coatings exhibit a fine grain structure of the grain size <100 nm. The XPS measurements were performed in an Escalab 200-X spectrometer (VG Instruments) using non-monochromatized A1 K alpha radiation from a twin Mg/A1 anode operating at 300 W. The hemispherical energy analyzer was operated in the CAE mode with a constant pass energy of 20 eV. In the present paper the following spectra are presented: survey spectrum, spectra of major elements zirconium and nitrogen (Zr 3d and n 1 s), spectra of minor elements oxygen and carbon (O 1 s and C 1s), and valence band spectrum. Spectra were background substracted using a Shirley method. Peak positions and widths were determined rom a least squeares fitting procedure.
Descriptors		ALLOYS ZIRCONIUM NITROGEN SPECTRUM ANALYSIS