Author/Editor		Milošev, Ingrid
Title		Titanium zirconium nitride by XPS
Type		članek
Source		Surf Sci Spectra
Vol. and No.		Letnik 6, št. 3
Publication year		1999
Volume		str. 177-83
Language		eng
Abstract		Titanium zirconium nitride (Ti0.53Zr0.47N) coatings have been deposited on polished steel substrates by dc reactive sputtering in a Sputron (Balzers AG) plasma-beam sputtering apparatus at 200 degree C. A thin intermediate layer of TiZr (0.08 microm) was deposited between the substrate and the 2.8 microm thick TiZrN coating. The deposition rate was 12 nm min-1. The partial pressure of nitrogen was 3 X 10-2 Pa, while the total working pressure was 2 x 10-1 Pa. Using a planetary substrate holder with double rotation, thickness and composition uniformity better than 2% were obtained. The average roughness, Ra, of the substrate was <0.04 microm, whereas after the deposition Ra values between 0.06 and 0.08 microm were measured for TiZrN coatings. The XPS measurements were performed in an Escalab 200-X spectrometer (VG Instruments) using nonmonochromatized A1 Ka radiation from a twin Mg/A1 anode operating at 300 W. The hemispherical energy analyzer was operated in the CAE mode with a constant pass energy of 20 eV. In the present paper the following spectra are presented: survey spectrum, spectra of major elements titanium, zirconium, and nitrogen (Ti 2p, Zr3d, and N 1s), spectra of minor elements oxygen and carbon (O 1s and C 1s), and valence band spectrum. Spectra were background subtracted using a Shirley method. Peak positions and widths were determined by least squares fitting.
Descriptors		MATERIALS TESTING TITANIUM ZIRCONIUM NITROGEN SPECTROMETRY, X-RAY EMISSION SURFACE PROPERTIES